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Large area high-speed metrology SPM system

Klapetek, P, Valtr, M, Picco, L, Payton, O D, Martinek, J, Yacoot, A and Miles, M
Keywords:

scanning probe microscopy, high-speed SPM, metrology

Document typeArticle
Journal title / SourceNanotechnology
Volume26
Issue065501
Publication date 2015
DOI10.1088/0957-4484/26/6/065501
LanguageEnglish

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