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Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm

Brand, U., XU, M. (PTB), Doering, L., Langfahl-Klabes, J., Behle, H., Bütefisch, S., Ahbe, T. (PTB, Braunschweig, Germany), Peiner, E. (TU Braunschweig), Völlmeke, S., Frank, T., Mickan, B. (PTB), Kiselev, I., Hauptmannl, M. and Drexel, M.

cantilever microprobe; high-speed; contact resonance; tip wear; piezo-resistive; mechanical damping; tip-testing standard

Document typeArticle
Journal title / SourceSensors 2019
Publisher's nameMDPI AG
Publisher's address (city only)Basel
Publication date 2019-03-22
Web URLhttps://www.mdpi.com/1424-8220/19/6/1410

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