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Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm

Kiselev, I., Doering, L., Mickan, B. (PTB), Frank, T., Völlmeke, S., Peiner, E. (TU Braunschweig), Ahbe, T. (PTB, Braunschweig, Germany), Bütefisch, S., Behle, H., Langfahl-Klabes, J., XU, M. (PTB), Brand, U., Hauptmannl, M. and Drexel, M.
Keywords:

cantilever microprobe; high-speed; contact resonance; tip wear; piezo-resistive; mechanical damping; tip-testing standard

Document typeArticle
Journal title / SourceSensors 2019
Volume19(6)
Issue1410
Publisher's nameMDPI AG
Publisher's address (city only)Basel
Publication date 2019-03-22
DOI10.3390/s19061410
Web URLhttps://www.mdpi.com/1424-8220/19/6/1410
LanguageEnglish

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