Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm
Brand U., XU M., Doering L., Langfahl-Klabes J., Behle H., Bütefisch S., Ahbe T., Peiner E., Völlmeke S., Frank T., Mickan B., Kiselev I., Hauptmannl M., Drexel M.cantilever microprobe; high-speed; contact resonance; tip wear; piezo-resistive; mechanical damping; tip-testing standard
Document type | Article |
Journal title / Source | Sensors 2019 |
Volume | 19(6) |
Issue | 1410 |
Publisher's name | MDPI AG |
Publisher's address (city only) | Basel |
Publication date | 2019-3-22 |
DOI | 10.3390/s19061410 |
Web URL | https://www.mdpi.com/1424-8220/19/6/1410 |
Language | English |