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Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages

Kren, P.
Keywords:

interferometry, capacitive distance measurement, flatness, three-flat test, translation stage, mirror, diffraction grating, deformation, layer

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Volume25
Issue044017
Page numbers / Article number5pp
Publication date 2014-03-5
ISSNOnline ISSN: 1361-6501. Print ISSN: 0957-0233
DOI10.1088/0957-0233/25/4/044017
Web URLhttp://iopscience.iop.org/0957-0233/25/4/044017/

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