Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages
Kren P.interferometry, capacitive distance measurement, flatness, three-flat test, translation stage, mirror, diffraction grating, deformation, layer
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 25 |
| Issue | 044017 |
| Page numbers / Article number | 5pp |
| Publication date | 2014-3-5 |
| ISSN | Online ISSN: 1361-6501. Print ISSN: 0957-0233 |
| DOI | 10.1088/0957-0233/25/4/044017 |
| Web URL | http://iopscience.iop.org/0957-0233/25/4/044017/ |