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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Optical mirror referenced capacitive flatness measurement and straightness evaluation of translation stages

Kren, P.

interferometry, capacitive distance measurement, flatness, three-flat test, translation stage, mirror, diffraction grating, deformation, layer

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Page numbers / Article number5pp
Publication date 2014-03-5
ISSNOnline ISSN: 1361-6501. Print ISSN: 0957-0233
Web URLhttp://iopscience.iop.org/0957-0233/25/4/044017/

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