Development of a design for an ionisation vacuum gauge suitable as a reference standard

Jenninger B., Anderson J., Bernien M., Bundaleski N., Dimitrova H., Granovskij M., Illgen C., Šetina J., Jousten K., Kucharski P., Reinhardt C., Scuderi F., Silva R.A.S., Stöltzel A., Teodoro O.M.N.D., Trzpil-Jurgielewicz B., Wüest M.
Keywords:

Ionisation gauge, Hot cathode, Sensitivity, Simulation, Reference standard

Document type Article
Journal title / Source Vacuum
Volume 183
Page numbers / Article number 109884
Publisher's name Elsevier BV
Publication date 2021-1
ISSN 0042-207X
DOI 10.1016/j.vacuum.2020.109884
Language English

Back to the list view