Influence of ion induced secondary electron emission on the stability of ionisation vacuum gauges

Illgen C., Jousten K., Teodoro O.M.N.D., Bundaleski N., Figueiredo I.
Keywords:

Ion induced secondary electron emissionIonisation vacuum gaugesXPS

Document type Article
Journal title / Source Vacuum
Page numbers / Article number 109907
Publisher's name Elsevier BV
Publication date 2020-11
ISSN 0042-207X
DOI 10.1016/j.vacuum.2020.109907
Web URL https://arxiv.org/abs/2011.08568
Language English

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