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Influence of ion induced secondary electron emission on the stability of ionisation vacuum gauges

Illgen, C., Jousten, K., Teodoro, O.M.N.D., Bundaleski, N. and Figueiredo, I.
Keywords:

Ion induced secondary electron emissionIonisation vacuum gaugesXPS

Document typeArticle
Journal title / SourceVacuum
Page numbers / Article number109907
Publisher's nameElsevier BV
Publication date 2020-11
ISSN0042-207X
DOI10.1016/j.vacuum.2020.109907
Web URLhttps://arxiv.org/abs/2011.08568
LanguageEnglish

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