Fabrication and Measurements of Inductive Devices for Scanning Microwave Microscopy

Hoffmann J., Vasyukov D., Quang T. L., Ziade F., Buchter A.

calibration, doping profiles, inductors, scanning probe microscopy, silicon compounds

Document type Proceedings
Journal title / Source 2019 IEEE 19th International Conference on Nanotechnology (IEEE-NANO)
Volume 2019
Issue -
Page numbers / Article number 1-4
Publisher's name IEEE
Publication date 2019-7
Conference name IEEE Nano
Conference date 22-07-2019 to 26-07-2019
Conference place Macao
ISSN Electronic ISSN: 1944-9380 Pri
ISBN Electronic ISBN: 978-1-7281-28
Web URL https://zenodo.org/record/4275929
Language English
Persistent Identifier https://zenodo.org/record/4275929

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