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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Correction for lateral distortion in coherence scanning interferometry

Henning, Andrew, Giusca, Claudiu, Forbes, Alistair B, Smith, Ian, Leach, Richard, Coupland, Jeremy and Mandal, Rahul
Keywords:

Surface analysis, Measurement, Distortion correction

Document typeArticle
Journal title / SourceCIRP Annals Manufacturing Technology
Volume62
Issue1
Page numbers / Article number547 to 550
Publication date 2013
DOI10.1016/j.cirp.2013.03.026
Web URLhttp://www.sciencedirect.com/science/article/pii/S0007850613000279
LanguageEnglish

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