Correction for lateral distortion in coherence scanning interferometry
Henning, Andrew, Giusca, Claudiu, Forbes, Alistair B, Smith, Ian, Leach, Richard, Coupland, Jeremy and Mandal, RahulSurface analysis, Measurement, Distortion correction
Document type | Article |
Journal title / Source | CIRP Annals Manufacturing Technology |
Volume | 62 |
Issue | 1 |
Page numbers / Article number | 547 to 550 |
Publication date | 2013 |
DOI | 10.1016/j.cirp.2013.03.026 |
Web URL | http://www.sciencedirect.com/science/article/pii/S0007850613000279 |
Language | English |