A virtual microscope for simulation of Nanostructures

Hansen P-E., Siaudinyte L.
Keywords:

coherent Mueller ellipsometry, scatterometry, TracOptic

Document type Article
Journal title / Source EPJ Web of Conferences
Volume 266
Page numbers / Article number 10004
Publisher's name EDP Sciences
Publisher's address (city only) Les Ulis cedex A, France
Publication date 2022-10-13
ISSN 2100-014X
DOI 10.1051/epjconf/202226610004
Language English

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