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Imaging scatterometry for flexible measurements of patterned areas

Hansen, P.R. and Madsen, M.H.
Keywords:

Imaging scatterometry flexible measurements patterned areas

Document typeArticle
Journal title / SourceOptics Express
Volume24
Issue2
Page numbers / Article number1109
Publisher's nameThe Optical Society
Publication date 2016-01-13
ISSN1094-4087
DOI10.1364/OE.24.001109
LanguageEnglish

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