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Enhanced Measurement Accuracy for Nanostructures Using Hybrid Metrology

Hansen, P-E., Johannsen, S.R., Jensen, S.A. and Hansen, P.
Keywords:

metrology, Mueller ellipsometry, inverse modelling, scatterometry, nanostructures

Document typeArticle
Journal title / SourceFrontiers in Physics
Volume9
Page numbers / Article number791459
Publisher's nameFrontiers Media SA
Publication date 2022-01-19
ISSN2296-424X
DOI10.3389/fphy.2021.791459
Web URLhttps://www.frontiersin.org/articles/10.3389/fphy.2021.791459/full
LanguageEnglish

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