Enhanced Measurement Accuracy for Nanostructures Using Hybrid Metrology
Hansen P-E., Johannsen S.R., Jensen S.A., Hansen P.metrology, Mueller ellipsometry, inverse modelling, scatterometry, nanostructures
| Document type | Article |
| Journal title / Source | Frontiers in Physics |
| Volume | 9 |
| Page numbers / Article number | 791459 |
| Publisher's name | Frontiers Media SA |
| Publication date | 2022-1-19 |
| ISSN | 2296-424X |
| DOI | 10.3389/fphy.2021.791459 |
| Web URL | https://www.frontiersin.org/articles/10.3389/fphy.2021.791459/full |
| Language | English |