Nano-probing station incorporating MEMS probes for 1D device RF on-wafer characterization
Daffé K., Marzouk J., Fellahi A. El, Xu T., Boyaval C., Eliet S., Grandidier B., Arscott S., Dambrine G., Haddadi K.MEMS GSG Probe, nano-prober, Nanowire, on-wafer, microwave
Document type | Proceedings |
Journal title / Source | 2017 47th European Microwave Conference (EuMC) |
Publisher's name | IEEE |
Publication date | 2017-10 |
Conference name | EuMC |
Conference date | 08-10-2017 to 12-10-2017 |
Conference place | Nuremberg |
DOI | 10.23919/EuMC.2017.8230973 |
Web URL | https://hal.archives-ouvertes.fr/hal-01726555 |
Language | English |