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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Nano-probing station incorporating MEMS probes for 1D device RF on-wafer characterization

Daffé, K. (IEMN-Univ-Lille1, France), Marzouk, J., Fellahi, A. El, Xu, T., Boyaval, C., Eliet, S., Grandidier, B., Arscott, S., Dambrine, G. (IEMN-Univ-Lille1, France) and Haddadi, K. (IEMN-Univ-Lille1, France)

MEMS GSG Probe, nano-prober, Nanowire, on-wafer, microwave

Document typeProceeding
Journal title / Source2017 47th European Microwave Conference (EuMC)
Publisher's nameIEEE
Publication date 2017-10
Conference nameEuMC
Conference date08-10-2017 to 12-10-2017
Conference placeNuremberg
Web URLhttps://hal.archives-ouvertes.fr/hal-01726555

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