Nano-probing station incorporating MEMS probes for 1D device RF on-wafer characterization

Daffé K., Marzouk J., Fellahi A. El, Xu T., Boyaval C., Eliet S., Grandidier B., Arscott S., Dambrine G., Haddadi K.

MEMS GSG Probe, nano-prober, Nanowire, on-wafer, microwave

Document type Proceedings
Journal title / Source 2017 47th European Microwave Conference (EuMC)
Publisher's name IEEE
Publication date 2017-10
Conference name EuMC
Conference date 08-10-2017 to 12-10-2017
Conference place Nuremberg
DOI 10.23919/EuMC.2017.8230973
Language English

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