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SIMS of Delta Layers in Organic Materials: Amount of Substance, Secondary Ion Species, Matrix Effects, and Anomalous Structures in Argon Gas Cluster Depth Profiles

Seah, M.P. (National Physical Laboratory, Teddington, TW11 0LW, United Kingdom), Havelund, R. (NPL, National Physical Laboratory, Teddington, Middlesex, TW11 0LW, United Kingdom) and Gilmore, I.S. (National Physical Laboratory, Teddington, TW11 0LW, United Kingdom)
Keywords:

mass-spectrometry, sputtering yields, response function, impurity layers, semiconductors, suppression, interfaces, emission, beams

Document typeArticle
Journal title / SourceThe Journal of Physical Chemistry C
Volume120
Issue46
Page numbers / Article number26328–26335
Publisher's nameAmerican Chemical Society
Publisher's address (city only)Washington
Publication date 2017-10-26
ISSN1932-7455
DOI10.1021/acs.jpcc.6b08646
Web URLhttp://pubs.acs.org/doi/abs/10.1021/acs.jpcc.6b08646
LanguageEnglish

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