SIMS of Delta Layers in Organic Materials: Amount of Substance, Secondary Ion Species, Matrix Effects, and Anomalous Structures in Argon Gas Cluster Depth Profiles
Seah M.P., Havelund R., Gilmore I.S.mass-spectrometry, sputtering yields, response function, impurity layers, semiconductors, suppression, interfaces, emission, beams
| Document type | Article |
| Journal title / Source | The Journal of Physical Chemistry C |
| Volume | 120 |
| Issue | 46 |
| Page numbers / Article number | 26328–26335 |
| Publisher's name | American Chemical Society |
| Publisher's address (city only) | Washington |
| Publication date | 2017-10-26 |
| ISSN | 1932-7455 |
| DOI | 10.1021/acs.jpcc.6b08646 |
| Web URL | http://pubs.acs.org/doi/abs/10.1021/acs.jpcc.6b08646 |
| Language | English |