Direct approach to determine the size setting error and size resolution of an optical particle counter

Geisler Mathias, Hensey Garry
Keywords:

cleanroom, light scattering, airborne particle counters, particle contamination, quality assurance, size resolution, calibration

Document type Article
Journal title / Source Review of Scientific Instruments
Volume 91
Issue 4
Page numbers / Article number 045105
Publisher's name AIP Publishing
Publication date 2020-4
ISSN 0034-6748, 1089-7623
DOI 10.1063/1.5142907
Language English

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