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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Towards traceable mechanical properties measurement of silicon nanopillars using contact resonance force microscopy

Gao, S. and Brand, U.

Microscopy, silicon, calibration, nanofibers, nanoparticles

Document typeProceeding
Journal title / SourceOptical Micro- and Nanometrology V
Publication date 2014-05-1
Conference nameSPIE Photonics Europe 2014
Conference dateApril 14-17, 2014
Conference placeBrussels, Belgium

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