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Towards traceable mechanical properties measurement of silicon nanopillars using contact resonance force microscopy

Gao, S. and Brand, U.
Keywords:

Microscopy, silicon, calibration, nanofibers, nanoparticles

Document typeProceeding
Journal title / SourceOptical Micro- and Nanometrology V
Volume9132D
Publication date 2014-05-1
Conference nameSPIE Photonics Europe 2014
Conference dateApril 14-17, 2014
Conference placeBrussels, Belgium
DOI10.1117/12.2052475
LanguageEnglish

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