A microscopy approach for in situ inspection of micro-coordinate measurement machine styli for contamination

Feng X., Pascal J.

µCMM, stylus inspection, contamination, microscopy, focus stacking

Document type Article
Journal title / Source Measurement Science and Technology
Volume 28
Issue 9
Page numbers / Article number 095010
Publisher's name IOP Publishing
Publication date 2017-8-21
ISSN 0957-0233, 1361-6501
DOI 10.1088/1361-6501/aa7c93
Language English

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