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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

A microscopy approach for in situ inspection of micro-coordinate measurement machine styli for contamination

Feng, X. (Max Planck Institute for Polymer Research, Germany), Pascal, J. and Feng, X. (Max Planck Institute for Polymer Research, Germany)

µCMM, stylus inspection, contamination, microscopy, focus stacking

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Page numbers / Article number095010
Publisher's nameIOP Publishing
Publication date 2017-08-21
ISSN0957-0233, 1361-6501

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