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Development of CO2 snow cleaning for in situ cleaning of µCMM stylus tips

Feng, X. (Max Planck Institute for Polymer Research, Germany), Kinnell, P.K. and Feng, X. (Max Planck Institute for Polymer Research, Germany)
Keywords:

snow cleaning, µCMM, precision cleaning, cleaning force

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Volume28
Issue1
Page numbers / Article number015007
Publisher's nameIOP Publishing
Publication date 2016-11-28
ISSN0957-0233, 1361-6501
DOI10.1088/1361-6501/28/1/015007
LanguageEnglish

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