Development of CO2 snow cleaning for in situ cleaning of µCMM stylus tips
Feng, X. (Max Planck Institute for Polymer Research, Germany), Kinnell, P.K. and Feng, X. (Max Planck Institute for Polymer Research, Germany)snow cleaning, µCMM, precision cleaning, cleaning force
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 28 |
| Issue | 1 |
| Page numbers / Article number | 015007 |
| Publisher's name | IOP Publishing |
| Publication date | 2016-11-28 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/28/1/015007 |
| Language | English |