On the characterization of ultra-precise X-ray optical components: advances and challenges inex situmetrology

Falkenberg G., Störmer M., Zeschke T., Buchheim J., Siewert F., Sankari R.
Keywords:

synchrotron optics; X-ray optics; metrology for synchrotron optics; slope measurement; NOM; multilayer; focusing mirrors

Document type Article
Journal title / Source Journal of Synchrotron Radiation
Volume 21
Issue 5
Page numbers / Article number 968-975
Publisher's name International Union of Crystallography (IUCr)
Publication date 2014-8-27
ISSN 1600-5775
DOI 10.1107/S1600577514016221
Language English

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