Self-excited Contact Resonance Operation of a Tactile Piezoresistive Cantilever Microprobe with Diamond Tip
Fahrbach M., Peiner E., XU M., Brand U.MEMS, microprobe, thermal actuator, piezoresistive cantilever, contact resonance
| Document type | Proceedings |
| Journal title / Source | SMSI 2021 - Sensors and Instrumentation |
| Volume | A5 MEMS Se |
| Page numbers / Article number | 73-74 |
| Publisher's name | AMA Service GmbH, Von-Münchhausen-Str. 49, 31515 Wunstorf, Germany |
| Publication date | 2021-5 |
| Conference name | SMSI 2021 Conference – Sensor and Measurement Science International |
| Conference date | 03-05-2021 to 06-05-2021 |
| Conference place | Digital |
| DOI | 10.5162/SMSI2021/A5.4 |
| ISBN | 978-3-9819376-4-0 |
| Web URL | https://www.ama-science.org/proceedings/details/3948 |
| Language | English |