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Higher-Mode Contact Resonance Operation of a High-Aspect-Ratio Piezoresistive Cantilever Microprobe

Fahrbach, M. and Peiner, E. (TU Braunschweig)
Keywords:

MEMS, microprobe, thermal actuator, piezoresistive cantilever, contact resonance

Document typeProceeding
Journal title / SourceSMSI 2020 - Sensors and Instrumentation
VolumeChapter A6
Issue2020
Page numbers / Article number89-90
Publisher's nameAMA Association for Sensors and Measurement
Publication date 2020-06
Conference nameSMSI 2020
Conference date22-06-2020 to 25-06-2020
Conference placeNuremberg, Germany
ISBN978-3-9819376-2-6
LanguageEnglish
Persistent Identifierhttps://www.ama-science.org/proceedings/details/3656

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