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Customized piezoresistive microprobes for combined imaging of topography and mechanical properties

Fahrbach, M., Friedrich, S., Behle, H., XU, M. (PTB), Cappella, B., Brand, U. and Peiner, E. (TU Braunschweig)
Keywords:

Cantilever microprobe, Piezoresistive, Atomic force microscopy, Force–distance curves, Contact resonance, Lubricants

Document typeArticle
Journal title / SourceMeasurement: Sensors
Volume15
Page numbers / Article number100042
Publisher's nameElsevier BV
Publication date 2021-06
ISSN2665-9174
DOI10.1016/j.measen.2021.100042
LanguageEnglish

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