Customized piezoresistive microprobes for combined imaging of topography and mechanical properties

Fahrbach M., Friedrich S., Behle H., XU M., Cappella B., Brand U., Peiner E.

Cantilever microprobe, Piezoresistive, Atomic force microscopy, Force–distance curves, Contact resonance, Lubricants

Document type Article
Journal title / Source Measurement: Sensors
Volume 15
Page numbers / Article number 100042
Publisher's name Elsevier BV
Publication date 2021-6
ISSN 2665-9174
DOI 10.1016/j.measen.2021.100042
Language English

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