Compact differential plane interferometer with in-axis mirror tilt detection

Rerucha S., Hola M., Sarbort M., Hrabina J., Oulehla J., Číp O., Lazar J.
Keywords:

Laser interferometryOptical metrologyDimensional measurementCommon path interferometerDifferential interferometerTilt compensationLarge volume metrology

Document type Article
Journal title / Source Optics and Lasers in Engineering
Volume 141
Page numbers / Article number 106568
Publisher's name Elsevier BV
Publication date 2021-6
ISSN 0143-8166
DOI 10.1016/j.optlaseng.2021.106568
Language English

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