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Compact differential plane interferometer with in-axis mirror tilt detection

Rerucha, S. (ISI, Brno, CZ), Hola, M. (ISI), Sarbort, M. (ISI), Hrabina, J. (ISI), Oulehla, J., Číp, O. (ISI) and Lazar, J. (ISI)
Keywords:

Laser interferometryOptical metrologyDimensional measurementCommon path interferometerDifferential interferometerTilt compensationLarge volume metrology

Document typeArticle
Journal title / SourceOptics and Lasers in Engineering
Volume141
Page numbers / Article number106568
Publisher's nameElsevier BV
Publication date 2021-06
ISSN0143-8166
DOI10.1016/j.optlaseng.2021.106568
LanguageEnglish

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