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Compact differential plane interferometer with in-axis mirror tilt detection

Rerucha, S. (ISI, Brno, CZ), Hola, M. (ISI), Sarbort, M. (ISI), Hrabina, J. (ISI), Oulehla, J., Číp, O. (ISI) and Lazar, J. (ISI)

Laser interferometryOptical metrologyDimensional measurementCommon path interferometerDifferential interferometerTilt compensationLarge volume metrology

Document typeArticle
Journal title / SourceOptics and Lasers in Engineering
Page numbers / Article number106568
Publisher's nameElsevier BV
Publication date 2021-06

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