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Numerical investigations of the influence of different commonly applied approximations in scatterometry

Endres, J., Burger, S., Wurm, M. and Bodermann, B.
Document typeProceeding
Journal title / SourceModeling Aspects in Optical Metrology IV
Peer-reviewed articleYes
Volume8789
Publication date 2013-05-13
Conference nameSPIE Modelling Aspects in Optical Metrology (World of Photonics Congress)
Conference date13.05. - 16.05.2013
Conference placeMunich, Germany
DOI10.1117/12.2022108
ISBN978-0-8194-9605-8
Web URLhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1687350

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