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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Preliminary comparison of DUV scatterometry for CD and edge profile metrology on EUV masks

Endres, J., Bodermann, B., Dai, G., Wurm, M., Henn, M.-A., Gross, H., Scholze, F. and Diener, A.
Document typeProceeding
Journal title / SourceFringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology
Page numbers / Article number695-700
Publication date 2014
Conference nameFRINGE 2013
Conference date8 - 11 September 2013
Conference placeNürtingen, Germany
DOI10.1007/978-3-642-36359-7_128
ISBN978-3-642-36358-0
Web URLhttp://link.springer.com/chapter/10.1007%2F978-3-642-36359-7_128#page-1
LanguageEnglish

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