Preliminary comparison of DUV scatterometry for CD and edge profile metrology on EUV masks

Endres J., Bodermann B., Dai G., Wurm M., Henn M.-A., Gross H., Scholze F., Diener A.
Document type Proceedings
Journal title / Source Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology
Page numbers / Article number 695-700
Publication date 2014
Conference name FRINGE 2013
Conference date 8 - 11 September 2013
Conference place Nürtingen, Germany
DOI 10.1007/978-3-642-36359-7_128
ISBN 978-3-642-36358-0
Web URL http://link.springer.com/chapter/10.1007%2F978-3-642-36359-7_128#page-1

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