Optical measurement of absolute flatness with the deflectometric measurement systems at PTB
Ehret G., Schulz M., Baier M., Fitzenreiter A.Document type | Proceedings |
Journal title / Source | Journal of Physics: Conference Series: (2013) |
Publisher's name | IOP |
Publication date | 2013 |
Conference name | 11th International Conference on Synchrotron Radiation Instrumentation (SRI 2012) |
Conference date | 09 - 13 July 2012 |
Conference place | Lyon, France |
ISSN | ISSN 1742-6596 |
Web URL | http://iopscience.iop.org/1742-6596/425/15/152016/pdf/1742-6596_425_15_152016.pdf |