Dataset for the publication "Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements"

Keywords:

surface topography measurement, roughness measurement, piezoresistive devices, microprobe, silicone fracture, tip characterization, fracture mechanics, surface cracks

Document type Datasets
Journal title / Source
Publication date 2022-3-14
Web URL https://oar.ptb.de/resources/show/10.7795/720.20220314
Language English
Persistent Identifier 10.7795/720.20220314

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