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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Modelling of the X,Y,Z positioning errors and uncertainty evaluation for the LNE's mAFM using the Monte Carlo method

Ducourtieux, Sebastien, Ceria, Paul, Boukellal, Younes, Allard, Alexandre, Fischer, Nicolas and Feltin, Nicolas

atomic force microscope, metrology, virtual instrument, measurement uncertainty, Monte Carlo method, Morris design, Sobol indices

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Page numbers / Article number034007
Publisher's nameIOP Publishing
Publisher's address (city only)Temple Circus, Temple, Bristol, BS1 6BE, United Kingdom
Publication date 2017-01-23
ISSN0957-0233, 1361-6501

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