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Squeeze-Film Effect on Atomically Thin Resonators in the High-Pressure Limit

Dolleman, R.J., Chakraborty, D., Ladiges, D.R., van der Zant, H.S.J., Sader, J.E. and Steeneken, P.G.
Keywords:

graphene, nanoelectromechanical systems (NEMS), pressure sensor, gas damping

Document typeArticle
Journal title / SourceNano Letters
Volume21
Issue18
Page numbers / Article number7617-7624
Publisher's nameAmerican Chemical Society (ACS)
Publication date 2021-08-30
ISSN1530-6984, 1530-6992
DOI10.1021/acs.nanolett.1c02237
LanguageEnglish

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