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Modeling of coherence scanning interferometry using classical Fourier optics

de Groot, P., Colonna de Lega, X., Su, R., Coupland, J. and Leach, R.
Keywords:

interferometry, interferometer, metrology, topography, coherence scanning interferometry,Fourier optics

Document typeArticle
Journal title / SourceOptical Engineering
Volume60
Issue10
Page numbers / Article number104106
Publication date 2021-10-18
DOI10.1117/1.OE.60.10.104106
Web URLhttps://www.spiedigitallibrary.org/journals/optical-engineering/volume-60/issue-10/104106/Modeling-of-coherence-scanning-interferometry-using-classical-Fourier-optics/10.1117/1.OE.60.10.104106.full
LanguageEnglish

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