Modeling of coherence scanning interferometry using classical Fourier optics

de Groot P., Colonna de Lega X., Su R., Coupland J., Leach R.
Keywords:

interferometry, interferometer, metrology, topography, coherence scanning interferometry,Fourier optics

Document type Article
Journal title / Source Optical Engineering
Volume 60
Issue 10
Page numbers / Article number 104106
Publication date 2021-10-18
DOI 10.1117/1.OE.60.10.104106
Web URL https://www.spiedigitallibrary.org/journals/optical-engineering/volume-60/issue-10/104106/Modeling-of-coherence-scanning-interferometry-using-classical-Fourier-optics/10.1117/1.OE.60.10.104106.full
Language English

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