Modeling of coherence scanning interferometry using classical Fourier optics

de Groot P., Colonna de Lega X., Su R., Coupland J., Leach R.

interferometry, interferometer, metrology, topography, coherence scanning interferometry,Fourier optics

Document type Article
Journal title / Source Optical Engineering
Volume 60
Issue 10
Page numbers / Article number 104106
Publication date 2021-10-18
DOI 10.1117/1.OE.60.10.104106
Language English

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