Fourier optics modelling of coherence scanning interferometers

de Groot P., Colonna de Lega X., Su R., Coupland J., Leach R.

Interferometry, interferometer, metrology, topography, CSI, Fourier optics

Document type Proceedings
Journal title / Source Applied Optical Metrology IV - Proc. of SPIE
Volume 11817
Page numbers / Article number 118170M
Publication date 2021-8
Conference name SPIE Optical Engineering + Applications
Conference date 01-08-2021 to 05-08-2021
Conference place San Diego, California
DOI 10.1117/12.2595668
Language English

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