Fourier optics modelling of coherence scanning interferometers

de Groot P., Colonna de Lega X., Su R., Coupland J., Leach R.
Keywords:

Interferometry, interferometer, metrology, topography, CSI, Fourier optics

Document type Proceedings
Journal title / Source Applied Optical Metrology IV - Proc. of SPIE
Volume 11817
Page numbers / Article number 118170M
Publication date 2021-8
Conference name SPIE Optical Engineering + Applications
Conference date 01-08-2021 to 05-08-2021
Conference place San Diego, California
DOI 10.1117/12.2595668
Web URL https://repository.lboro.ac.uk/articles/conference_contribution/Fourier_optics_modelling_of_coherence_scanning_interferometers/16948690
Language English

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