On-Wafer Broadband Microwave Measurement of High Impedance Devices-CPW Test Structures with Integrated Metallic Nano-Resistances
Daffé K., Mubarak F., Mascolo V., Votsi H., Ridler N.M., Dambrine G., Roch I., Haddadi K.S-parameters, microwave, uncertainty, on-wafer,
Document type | Proceedings |
Journal title / Source | 2018 48th European Microwave Conference (EuMC) |
Page numbers / Article number | 25-28 |
Publisher's name | IEEE |
Publication date | 2018-11 |
Conference name | EuMC 2018 |
Conference date | 23-09-2018 to 27-09-2018 |
Conference place | Madrid |
DOI | 10.23919/EuMC.2018.8541607 |
Web URL | https://hal.archives-ouvertes.fr/hal-02056825 |
Language | English |