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On-Wafer Broadband Microwave Measurement of High Impedance Devices-CPW Test Structures with Integrated Metallic Nano-Resistances

Daffé, K. (IEMN-Univ-Lille1, France), Mubarak, F., Mascolo, V., Votsi, H., Ridler, N.M. (NPL, National Physical Laboratory, Teddington, United Kingdom), Dambrine, G. (IEMN-Univ-Lille1, France), Roch, I. and Haddadi, K. (IEMN-Univ-Lille1, France)
Keywords:

S-parameters, microwave, uncertainty, on-wafer,

Document typeProceeding
Journal title / Source2018 48th European Microwave Conference (EuMC)
Page numbers / Article number25-28
Publisher's nameIEEE
Publication date 2018-11
Conference nameEuMC 2018
Conference date23-09-2018 to 27-09-2018
Conference placeMadrid
DOI10.23919/EuMC.2018.8541607
Web URLhttps://hal.archives-ouvertes.fr/hal-02056825
LanguageEnglish

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