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Influence of electron landing energy on the measurement of the dimensional properties of nanoparticle populations imaged by SEM

Crouzier, L., Delvallée, A., Devoille, L., Artous, S., Saint-Antonin, F. and Feltin, N.
Keywords:

SEMElectron landing energyNanoparticlesDimensional propertiesMetrology

Document typeArticle
Journal title / SourceUltramicroscopy
Volume226
IssueJuly
Page numbers / Article number113300
Publisher's nameElsevier BV
Publication date 2021-07
ISSN0304-3991
DOI10.1016/j.ultramic.2021.113300
Web URLhttps://reader.elsevier.com/reader/sd/pii/S0304399121000875?token=909C79CE3C3F38B3A66DB9C19F03753326F07A8C27AA6D2752B29C970B6044F466C12F79E394D396CE7598E6F1497E2E&originRegion=eu-west-1&originCreation=20210517160957
LanguageEnglish

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