Influence of electron landing energy on the measurement of the dimensional properties of nanoparticle populations imaged by SEM

Crouzier L., Delvallée A., Devoille L., Artous S., Saint-Antonin F., Feltin N., Hodoroaba V-D.
Keywords:

SEMElectron landing energyNanoparticlesDimensional propertiesMetrology

Document type Article
Journal title / Source Ultramicroscopy
Volume 226
Issue July
Page numbers / Article number 113300
Publisher's name Elsevier BV
Publication date 2021-7
ISSN 0304-3991
DOI 10.1016/j.ultramic.2021.113300
Web URL https://reader.elsevier.com/reader/sd/pii/S0304399121000875?token=909C79CE3C3F38B3A66DB9C19F03753326F07A8C27AA6D2752B29C970B6044F466C12F79E394D396CE7598E6F1497E2E&originRegion=eu-west-1&originCreation=20210517160957
Language English

Back to the list view