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Lens aberration compensation in interference microscopy

Su, R., Thomas, M., Liu, M., Drs, J., Bellouard, Y., Pruss, C., Coupland, J. and Leach, R.
Keywords:

Lens aberration interference microscopy

Document typeArticle
Journal title / SourceOptics and Lasers in Engineering
Volume128
Page numbers / Article number106015
Publisher's nameElsevier BV
Publisher's address (city only)Elsevier BV Radarweg 29 Amsterdam NX 1043 Netherlands
Publication date 2020-05
ISSN0143-8166
DOI10.1016/j.optlaseng.2020.106015
LanguageEnglish

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