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Reconstruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier scatterometry

Coene, W.M.J., Pereira, S.F., Roy, S., El Gawhary, O., Ramanandan, G.K.P., Petrik, P. (Department of Imaging Science and Technology, Faculty of Applied Sciences, Delft University of Technology, P. O. Box 5046, 2600GA Delft, The Netherlands; Research Centre for Natural Sciences, Institute for Technical Physics and Materials Science, Hungari), Kumar, N. and Urbach, H.P. (Delft University of Technology, Delft, The Netherlands)
Keywords:

sub-wavelength nano-positioning gratings coherent Fourier scatterometry

Document typeArticle
Journal title / SourceOptics Express
Volume22
Issue20
Page numbers / Article number24678
Publisher's nameThe Optical Society
Publication date 2014-10
ISSN1094-4087
DOI10.1364/OE.22.024678
LanguageEnglish

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