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High Temperature Thermal Conductivity of Amorphous Al2O3 Thin Films Grown by Low Temperature ALD

Cappella, Andrea, Battaglia, Jean-Luc, Schick, Vincent, Kusiak, Andrzej, Lamperti, Alessio, Wiemer, Claudia and Hay, Bruno
Keywords:

ALD, amorphous alumina, modulated photothermal radiometry, thermal conductivity

Document typeArticle
Journal title / SourceAdvanced Engineering Materials
Publication date 2013-08-6
DOI10.1002/adem.201300132
LanguageEnglish

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