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Oxide Layer Mass Determination at the Silicon Sphere of the Avogadro Project

Busch, Ingo, Danzebrink, Hans-Ulrich, Kumrey, Michael, Borys, Michael and Bettin, Horst
Keywords:

Avogadro; density; ellipsometry; ?otation; silicon; silicon oxide; surface; X-ray re?ectometry (XRR)

Document typeArticle
Journal title / SourceIEEE Transactions on Instrumentation and Measurement
Volume58
Issue4
Page numbers / Article number891-896
Publication date 2009-04
LanguageEnglish

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